Abstract
Co-Zn ferrite films were deposited at substrate temperature T/sub s/ from 90 to 500/spl deg/C by using facing targets sputtering. Specimen films deposited at T/sub s/ of 200/spl deg/C and below were composed of crystallites with excellent (111) orientation and possessed a very flat surface, where the center-line average roughness R/sub a/ was 2.5 nm. The saturation magnetization 4/spl pi/M/sub s/ took a maximum value of 4.8 kG at T/sub s/ of 250/spl deg/C and the in-plane and perpendicular coercivities H/sub c/spl par// and H/sub c/spl perp// were both 1.5 kOe. A high linear recording density of 105 kFRPI was achieved for a specimen disk with Co-Zn ferrite film deposited at 200/spl deg/C by using a MIG type head with gap length of 0.27 /spl mu/m.
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