Abstract
Titanium nitride (TiN) thin films were deposited by reactive pulsed laser deposition (RPLD) technique. For the first time, the composition evaluated from proton elastic backscattering spectrometry, in a quantitative manner, revealed a dependence on the partial pressure of nitrogen from 1 to 10 Pa. Grazing incidence-XRD (GI-XRD) confirmed the formation of predominantly nanocrystalline TiN phase with a crystallite size of around 30 nm. The hardness showed maximum value of ~30 GPa when the composition is near stoichiometric and the friction coefficient was found to be as low as 0.3. In addition, a systematic optical response was observed as a function of deposition pressure from the surface of the TiN films using spectroscopic ellipsometry.
Highlights
Titanium nitride (TiN), by virtue of its high hardness, high melting point, low density, chemical stability, corrosion resistance, low coefficient of friction, lower wear rate, and so forth, is the most extensively used protective coating material [1–4]
We present the systematic evolution of structure through grazing incident X-ray diffraction (GIXRD) analysis and quantitative composition variation of reactive pulsed laser deposition (RPLD) grown TiN lms as a function of deposition pressure in the range of 1.0 to 10.0 Pa using proton elastic back scattering Journal of Materials (PEBS) spectrometry
A target-substrate distance of 40 mm was maintained during the deposition, and 1,00,000 laser pulses were red to get approximately 1 μμm thick coatings. e chamber was evacuated to a base pressure of 5.0 × 10−5 Pa using a turbomolecular pumping system
Summary
Titanium nitride (TiN), by virtue of its high hardness, high melting point, low density, chemical stability, corrosion resistance, low coefficient of friction, lower wear rate, and so forth, is the most extensively used protective coating material [1–4]. All these properties depend on the coating techniques and vary as a function of deposition conditions. We present the systematic evolution of structure through grazing incident X-ray diffraction (GIXRD) analysis and quantitative composition variation of RPLD grown TiN lms as a function of deposition pressure in the range of 1.0 to 10.0 Pa using proton elastic back scattering. The effect of deposition pressure in in uencing the structure, composition, and morphology of TiN lms is addressed
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