Abstract
Concentration distributions of reactant gas in a horizontal epitaxial reactor were numerically calculated from fundamental equations for the case where the overall reaction rate is affected by the surface-reaction rate at the reaction surface. The reactant concentration in the reactor was affected by distance from the leading edge, feed rate of gas, width of reaction zone and reaction rate constant, but the profile of reactant concentration distributions in the cross-sectional direction were not affected very much by these factors. However, the concentration distributions were influenced quite sensitively by Gr. To check the calculated results, carbon plates were burned in this reactor under the same conditions as those in the calculation, and local concentration of carbon dioxide was measured. The calculated concentration distributions agreed well with the experimental ones. Furthermore, the reactant concentration distributions for the case of surface reaction rate control were compared with those for the case of mass transfer rate control, and the concentration distributions of the former became more uniform than those of the latter.
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