Abstract
AbstractThe PVD coatings were prepared using Sulzer Innotec's closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters of bias and oxygen flow rate were varied. The prepared samples were analysed by RBS (Rutherford backscattering spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings, and by ERDA (elastic recoil detection analysis) to investigate the hydrogen content in the surface layer. XPS was used to characterize the near‐surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced according to the increased bias and the decreased oxygen flow rate. We observed the increasing hardness in the case of the higher Ti content layers prepared. We found that a contaminated surface layer exists in which hydrogen, oxygen and carbon are incorporated. Copyright © 2004 John Wiley & Sons, Ltd.
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