Raw data for "Photonic crystal waveguides on silicon rich nitride platform"

Abstract

We demonstrate design, fabrication, and characterization of two-dimensional Photonic Crystal (PhC) waveguides on suspended Silicon rich nitride (SRN) platform for applications at telecom wavelengths. Simulation results suggest that a 210 nm photonic band gap can be achieved in such PhC structures. We also developed a fabrication process to realize suspended PhC waveguides with a transmission bandwidth of 20 nm for W1 PhC waveguide and over 70 nm for W0.7 PhC waveguide. Using the Fabry–Perot oscillations of the transmission spectrum we estimated group index of over 110 for W1 PhC waveguides. For W1 waveguide we estimated a propagation loss of 53 dB/cm for a group index of 37 and for W0.7 waveguide the lowest propagation was 4.6 dB/cm.