Abstract
This paper deals with the laser micro processing technology in the fabrication of micro-electro-mechanical system (MEMS) device. A polymer-based capacitive micro accelerometer is designed and modeled in this paper, and is fabricated with laser micromachining and micro patterning technologies. The fabricated micro accelerometer is finally experimentally verified by measuring the shock of a dropping hammer. It is demonstrated that pulsed UV laser micro processing technology provides a quite suitable fabrication method for polymer-based MEMS rapid prototyping and small volume production.
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