Rapid prototyping of integrated microfluidic devices for combined radiation detection and plasma separation

Abstract

A rapid prototyping method was developed to integrate a microfluidic plasma separation device over a Si based radiation detector. KMPR photoresist was used to produce high pressure resistant channels sealed by a glass cover. Two methods were investigated to make access holes in the cover: laser micromachining and a simplified glass wet etching process. The lab-on-chip concept where a plasma separation device is coupled to an embedded on-chip p-i-n photodiode used as a high sensitivity beta particle detector was investigated. A first detector prototype was fabricated and characterized. KMPR autofluorescence was investigated to optimize microfluidic function characterization with fluorescent beads.