Abstract
The conventional numerical analysis methods could not perform the rapid system-level simulation to MEMS especially when containing sensing and testing integrated circuit. Using reduced-order model can simulate the behavior characteristic of multiphysical energy domain models including nonlinear analysis. This paper set up the reduced-order model of electrothermal microgripper using Krylov subspace projection method. The system functions were assembled through finite element analysis using Ansys. We took the structure-electro-thermal analysis to microgripper finite element model and reduced model order through second-order Krylov subspace projection method based on Arnoldi process. The simulation result from electrothermal reduced order model of microgripper is accurate compared with finite element analysis and even more has a few computing consuming.
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