Abstract
A rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high transparency at wavelengths between approximately 0.76–20 μm were fabricated within 36 min. More importantly, the size of the microlenses can be controlled by adjusting the laser power. Their high-quality infrared optical performance was also demonstrated. This method holds great promise for the development of ZnSe-based micro-optical devices.
Highlights
Microlens arrays (MLAs) have diverse applications for infrared detection [1], beam homogenization [2], microimaging [3], optical communication [4,5], and microfabrication [6].At present, silicon and quartz are widely used for processing MLAs
Due to its excellent chemical and physical properties, zinc selenide (ZnSe) has been widely used in solar cells, lasers, logic gates, flat panel displays and transistors [12,13,14,15]
The measurement surement results show that the average diameter (D)
Summary
Microlens arrays (MLAs) have diverse applications for infrared detection [1], beam homogenization [2], microimaging [3], optical communication [4,5], and microfabrication [6]. Silicon and quartz are widely used for processing MLAs. the infrared cutoff wavelength of quartz is shorter (the longest wavelength is approximately 3.5 μm). Femtosecond laser manufacturing has become a powerful tool for processing optical devices based on a wide range of materials, including semiconductors [19], metals [20], and dielectrics [21]. Laser ablation the etching process involved in this technology still takes a lot of time. The etching process involved in this technology still takes a lot of time. In this this work, work, we we propose propose aarapid rapidprocess processfor forthe therealization realizationof oflarge-area large-areaconcave concave.
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