Abstract
Using a graphite crucible as the counter-electrode, platinum microprobes with an aspect ratio of 30 and a tip apex radius less than 100 nm were fabricated by an electrochemical discharge etching process. The “neck-in” structure on the platinum wire induced by the electrical discharge at the liquid-air interface plays a key role in the probe shape and the voltage of the following pure electrochemical etching determines the final probe aspect ratio and tip dimensions. Moreover, the shape and diameter of the graphite counter-electrode also exhibit a significant effect on the realization of high-aspect-ratio probes. The method presented here provides a simple and rapid approach to the fabrication of micro-tools for micromachining, micromanipulation, as well as biomedical applications.
Highlights
In recent years, micro/nanoprobes have been widely investigated for their application in scanning probe microscopy, micro/nanomanipulation, multipoint contact measurements, neural implants and electrochemical micromachining [1,2,3,4,5]
An electrochemical discharge etching method was investigated for the fabrication of platinum probes with high aspect ratio and nanoscale tip apex radius
A “neck-in” structure was fabricated at a voltage of 35 V by the combination effect of electrical discharge etching at the liquid surface and electrochemical etching in the solution
Summary
Micro/nanoprobes have been widely investigated for their application in scanning probe microscopy, micro/nanomanipulation, multipoint contact measurements, neural implants and electrochemical micromachining [1,2,3,4,5]. Different techniques can be used to fabricate sharp tips, including cutting [8], mechanical pulling [9], grinding [10], ion milling [11], ion beam–induced deposition [12], electrochemical etching [13,14,15], and electrochemical machining [5]. Among these methods, electrochemical etching is the most widely explored technique for microprobe fabrication because of its low cost, reproducibility, and ease of implementation [16]. Tungsten probes with an ultra-high aspect ratio of 200 were fabricated by pulse electrochemical machining [5]
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