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https://doi.org/10.1117/1.601335
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Cite Journal: Optical Engineering |  Publication Date: May 1, 1997 |
 Citations: 4 |
A method for rapid alignment of laser beams in optical systems is presented. It employs a Seward alignment module (SAM) to qualify both the spatial position and angular direction of the beam. Alignment procedures for turning mirrors and laser mounts are described. Application of the SAM on two complex laser-etching systems is presented.
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