Abstract

The author investigates quantitatively the influence of random surface roughness on the quality factor Q of nanoresonators due to noise by impinging gas molecules. The roughness is characterized by the amplitude w, the correlation length ξ, and the roughness exponent H that describes fine roughness details at short wavelengths. Surface roughening (decreasing H and increasing ratio w∕ξ) leads to lower Q, which translates to lower sensitivity to external perturbations, and a higher limit to mass sensitivity. The influence of the exponent H is shown to be important as that of w∕ξ, indicating the necessity for precise control of the surface morphology.

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