Abstract
Silicon-based semiconductor materials, especially {001} silicon, are the main functional materials in the electronic information industry. Residual stress plays an important role in the reliability of semiconductor devices. However, the stress state is often simplified, especially when the effect of shear stress on Raman wavenumber is neglected. In this study, the relationship between the Raman wavenumber and the plane stress components of typical crystal planes is established. It is observed that only the Raman wavenumber of the {001} plane has nothing to do with plane shear stress. Finally, a calibration experiment was carried out to validate the theoretical deduction.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
