Abstract
ZnO thin films have been deposited by atomic layer deposition (ALD) from diethyl zinc and H2O vapor. The X-ray diffraction spectra showed a c-axis preferential growth in the (002) plane. The optical vibrational properties of deposited thin films ZnO were investigated using Raman scattering spectroscopy. The ALD ZnO thin films exhibited A1 and E2 optical phonons. A blue shift was found in the Raman peaks in ALD ZnO which is indicative of a compressive stress.
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