Abstract
AbstractRaman scattering measurements are used to characterize the components of microcrystalline Si and carbon films. A model is described which addresses the properties of Raman scattering from composites of materials of different optical absorption. The analysis shows that the observed spectra are dependent on both the percentage of the components and on the domain size of the more highly absorbing domains. Carbon films produced by different enhanced CVD techniques show both sp2 (graphite) and sp3 (diamond) regions. Silicon films prepared by excimer laser exposure of hydrogenated a-Si and by magnetron sputtering showed features due to both microcrystalline and amorphous regions. The experimental results reflect the length scales of the domains and vibrational excitations.
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