Abstract
Using a combination of stain-etching with subsequent annealing in hydrogen, porous germanium films with a high concentration of germanium nanocrystals (NCs) were prepared for the first time. Structural studies of the films were performed by X-ray reflectometry and high-resolution triple-crystal diffractometry and Raman light spectroscopy methods. From a thorough analysis of the experimental data obtained by both methods, it was revealed that the films consist of germanium NCs with average sizes approximately 8–10 nm in annealed films. Other basic information about thickness, porosity, roughness, and lateral coherence length of the films is also presented.
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