Abstract

This paper reports the surface roughness effect on magnetic properties of Co thin films and the switching properties of the multilayer structures. Surface roughness is varied by using Ni 80Fe 20 thin film as an underlayer. The surface roughness of Ni 80Fe 20 thin films was controlled by applying different radio frequency (RF) biases to the substrate during the sputtering of Ni 80Fe 20 underlayer. Surface roughness effect on the magnetic properties of Co thin films and the switching properties of the multilayer structures were studied with Si/Ni 80Fe 20/Al/Co/Al and Si/Ni 80Fe 20/Al/Co/Al 2O 3/Ni 80Fe 20/Al multilayer films. Results indicate that the RF-substrate-bias-induced surface roughness has a great influence on the magnetic properties of Co films and the switching properties of the multilayer structures.

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