Radio-frequency plasma functionalization of carbon nanotubes surface O2, NH3, and CF4 treatments

Abstract

Inductive coupled rf-plasma at 13.56 MHz was used to modify multiwalled carbon nanotubes (MWCNTs). This technique can be easily used to tailor the chemical composition of carbon nanotubes by attaching a wide variety of functional groups at their surface: oxygen-, nitrogen-, and fluorine-containing groups have been grafted. The influence of various plasma conditions (power, type of gas, treatment time, pressure, position of the CNT sample inside the chamber) on the functionalization of the MWCNT surface was analyzed by x-ray photoelectron spectroscopy. The results show that for too high oxygen plasma power, chemical etching occurs at the surface of the CNT, thus destroying its structure. On the other hand, for optimal values of the plasma parameters, functional groups (hydroxide, carbonyl, carboxyl, amine, fluorine, etc.) were found to bond to the CNT surface, suggesting that both the concentration and type of the functional groups are in close connection with the plasma conditions. These results were compared to interaction energies predicted by ab initio calculations for different functional groups under consideration, showing that functionalization by oxygen plasma produces mainly functional groups with lower interaction energy.