Abstract
An inductively coupled radio frequency (rf) linear ion beam source with a 6×66 cm rectangular cross-section beam has been developed and tested. This source was designed to provide filamentless, low maintenance operation, and large area coverage for materials processing applications, typically involving translation of substrates across the narrow beam dimension. The source has been operated on argon, oxygen, and argon/oxygen mixtures at beam energies from 100–1500 eV. Beam currents up to 1.0 A have been obtained with argon at a rf discharge power of approximately 1 kW. Longitudinal beam current uniformity of better than ±10% has been obtained over a 50 cm length at a distance 25 cm from the ion source over a wide range of operating conditions. Source operating characteristics and performance data are presented including lateral and longitudinal beam current density profiles.
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