Abstract
Measurements on radio-frequency discharges in argon have been performed by using a magnetic field normal to the r.f. electric field. The power absorbed by the discharge has been determined as a function of the pressure inside the chamber and the magnetic fields: different curves have been obtained by increasing or decreasing the pressure. Different geometrical arrangements have been used. The qualitative behaviour of the discharge has been interpreted by using an average electron picture.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have