Measured and simulated electron energy distribution functions in a low-pressure radio frequency discharge in argon

Abstract

We report a combined experimental and computational study of a low-pressure radio frequency discharge in argon. We have determined the electron energy distribution function experimentally using a Langmuir probe system and by simulation using the particle in cell method. A close comparison of these data shows good agreement over pressures from 20 to 200 mTorr. This pressure range encompasses the putative transition from a stochastic to an ohmic electron heating mode [V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996 (1990)]. The simulation does show such a transition, and we agree with earlier estimates of the transition pressure.