Radiation hardness evaluation of the commercial 150 nm CMOS process using 60Co source

Abstract

We present a study of radiation effects on MOSFET transistors irradiated with a 60Co source to a total absorbed dose of 1.5 Mrad. The transistor test structures were manufactured using a commercial 150 nm CMOS process and are composed of transistors of different types (NMOS and PMOS), dimensions and insulation from the bulk material by means of deep n-wells. We have observed a degradation of electrical characteristics of both PMOS and NMOS transistors, namely a large increase of the leakage current of the NMOS transistors after irradiation.