Abstract

The degradation of 2-MeV electron-irradiated C-doped SiGe diodes was investigated. After electron irradiation, the reverse current increases with increasing electron fluence, while the capacitance decreases. At the highest fluence studied (1×10 16 e/cm 2), a different behaviour of the reverse current with junction area was observed. DLT spectra show that a broad peak is observed for p +/n and n +/p diodes after 1×10 15 e/cm 2 electron irradiation. The degradation of the diodes is mainly attributed to the radiation-induced defects in SiGe layer.

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