Abstract
Fluorine negative ions (F-) produced by a column-type magnetized plasma with CF4 gas diffuse radially and accumulate around the plasma column. To explain the features of this accumulation, the radial profiles of the negative-ion density n- as functions of discharge parameters are measured using a hot-wire-type Langmuir probe. The modified Bohm theory is applied to evaluate n- as n-/ne>2 and the negative ions are well confined between two end plates. n- around the plasma column decreases with increasing magnetic field from 0.01 to 0.15 T. With increasing pressure from 0.25 to 1.1 Pa, n- around the plasma column gradually decreases.
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