Racetrack resonator based integrated phase shifters on silicon nitride platform

Abstract

We demonstrate a compact, low power consumption phase shifter based racetrack resonator hybrid integrated with few-layer MoS2. The phase shifter is fabricated on a low-loss SiN platform. By using wet transfer method, the few-layer MoS2 is transferred to the SiN waveguide, and the ionic liquid is introduced to form a capacitor configuration. In the presence of electrostatic doping, the effective index of MoS2-SiN waveguide can be efficiently modulated by adjusting bias voltage. The phase tuning efficiency of our device is measured as 13.24 pm/V at 1530 nm, and the corresponding VπL is calculated as 0.41 V∙cm. The results indicate that the strong light-matter interaction between few-layer MoS2 and SiN photonic device in near-infrared waveband, which can be used for low-loss integrated optical links.