Quasi-closed diaphragm based piezoelectric micromachined ultrasonic transducer with reduced Q and stress sensitivity for in-air rangefinding

Abstract

To improve the performance of the Piezoelectric Micromachined Ultrasonic Transducer (PMUT) based rangefinder and decrease its stress sensitivity, a novel design with quasi-closed structure is proposed. It adopts a circular piezoelectric composite diaphragm structure with clamped boundary, in which all the deposited stack layers in its central region are intentionally removed and additional cross-slits are created into the remaining silicon device layer. Due to the reduced mass and the enhanced thermal-viscous damping at slits, a 35.2 % decrease in quality factor Q has been achieved in the proposed PMUT when compared with the conventional design, resulting in a distinctly reduced blind area from 231.3 mm to 170.7 mm. At the same time, the proposed quasi-closed PMUT facilitates the release of accumulated stress in the device structure during fabrication and operation. As a result, an approximate 50 % reduction in frequency deviation between different as-fabricated PMUTs across the same wafer has been successfully obtained. Moreover, due to the increased linear operation range, the developed bare PMUT chip demonstrates a maximum detection distance of 3 m at the operation frequency of 71.5 kHz under 40 Vpp driving voltage. Given the advantages of lower Q, insensitivity to stress, good fabrication consistency and large linear operation range, the proposed quasi-closed PMUT design can well address the requirements on small blind area and large detection range for distance sensing applications.