Quasi-3D harnessing of visible light in emissive III-V on Si microstructures: Application to multiple-quantum-well color conversion layers

Abstract

We report on the design, fabrication, and characterization of the first photonic crystal (PhC)-based red multiple-quantum-well (MQW) color converters fully optimized for augmented reality (AR) microdisplays through a quasi-3D light harnessing principle. This principle leverages an aluminum (Al) bottom reflector and a silicon dioxide (SiO2) gap to harness the bottom-emitted light, along with copper (Cu) lateral mirrors and a silicon nitride (SiN) phase-matcher for Bloch-mode replication. These structures were designed using 3D-FDTD simulations. As a proof-of-principle, we fabricated corresponding devices that exhibit promising characteristics, including record light extraction efficiencies over 40 % for 4 μm pixels and directional emission patterns. Time-resolved photoluminescence (TRPL) analyses, along with a four-wave intensity model developed in this work, indicate that there is still room for improvement. We believe that the guidelines established in this study could pave the way for the use of MQW color converters in the next generation of very bright, high-resolution RGB microdisplays for AR glasses and beyond.