Abstract
In this study, an AlGaN/GaN high electron mobility transistor with lateral inhomogeneous AlGaN barrier layer (LI-AlGaN HEMT) is proposed and studied systematically. The LI-AlGaN HEMT comprises three AlGaN regions with varying Al content, connected to the source, gate, and drain, respectively. With the increase of Al content in each region, the saturation current of the LI-AlGaN HEMT increases gradually, while the on-resistance (Ron) and breakdown voltage (BV) decrease. The threshold voltage (Vth) of the LI-AlGaN HEMT depends only on the Al content of AlGaN beneath the gate. By introducing the source field plate (FP), the calculated output current of the conventional FP-HEMT is consistent with the experimental data. After optimizing Al content, the LI-AlGaN FP-HEMT has the same Vth compared with conventional FP-HEMT. However, the saturation current is increased by approximately 20 % and the Ron is decreased by approximately 30 %. Additionally, the BV is increased to 1008 V. So the optimized lateral inhomogeneous AlGaN HEMT has better DC characteristics and is suitable for high power GaN device applications.
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