Abstract

In this paper, we present quantum transport simulation of nanoscale semiconductor devices based on Wigner Monte Carlo (WMC) approach. We have found that the WMC approach can accurately handle higher-order quantized subbands, tunneling, quantum reflection, and decoherence processes occurring in nanoscale semiconductor devices. Furthermore, we have demonstrated that carrier quantum transport in source electrode plays an important role in devices extremely downscaled into the nanometer regime.

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