Abstract

A model is developed for a detailed investigation of the current flowing through a cylindrical sub-0.1 μm MOSFET with a closed gate electrode. The quantum mechanical features of the lateral charge transport are described by a Wigner distribution function which is explicitly dealing with electron scattering due to acoustic phonons and acceptor impurities. A numerical simulation is carried out to obtain a set of I– V characteristics for various channel lengths. It is demonstrated that inclusion of the collision term in the numerical simulation is important for low values of the source–drain voltage. The calculations have further shown that the scattering leads to an increase of the electron density in the channel thereby smoothing out the threshold kink in the I– V characteristics. An analysis of the electron phase-space distribution shows that scattering does not prevent electrons from flowing through the channel as a narrow stream, and that features of both ballistic and diffusive transport may be observed simultaneously.

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