Abstract
Radiation pressure has recently been used to effectively couple the quantum motion of mechanical elements to the fields of optical or microwave light. Integration of all three degrees of freedom—mechanical, optical and microwave—would enable a quantum interconnect between microwave and optical quantum systems. We present a platform based on silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Using planar capacitors with vacuum gaps of 60 nm and spiral inductor coils of micron pitch we realize microwave resonant circuits with large electromechanical coupling to planar acoustic structures of nanoscale dimensions and femtoFarad motional capacitance. Using this enhanced coupling, we demonstrate microwave backaction cooling of the 4.48 MHz mechanical resonance of a nanobeam to an occupancy as low as 0.32. These results indicate the viability of silicon nitride nanomembranes as an all-in-one substrate for quantum electro-opto-mechanical experiments.
Highlights
Radiation pressure has recently been used to effectively couple the quantum motion of mechanical elements to the fields of optical or microwave light
Si3N4 thin films have been used to support low loss guided modes for microphotonic applications, with a measured loss tangent in the near-infrared of o3 Â 10 À 7. Owing to their unique elastic and dielectric properties, Si3N4 nanomembranes have recently been used in a variety of cavityoptomechanical and cavity-electromechanical experiments[11] involving the interaction of membrane motion and radiation pressure of either optical or microwave light
Combining the large capacitance of planar vacuum gap capacitors and the low stray capacitance of compact spiral inductor coils formed on a Si3N4 nanomembrane, we show theoretically that it is possible to realize large electromechanical coupling to both in-plane flexural modes and localized phononic bandgap modes of a patterned beam structure
Summary
Radiation pressure has recently been used to effectively couple the quantum motion of mechanical elements to the fields of optical or microwave light.
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