Abstract
A review is presented of low-energy ion scattering spectroscopy (ISS) as a tool for surface atomic structure analysis. Especially, quantitative surface atomic structure analysis by ISS is highlighted. An important difference between ISS and Rutherford backscattering spectroscopy (RBS), a specialization of ISS for quantitative surface atomic structure analysis, and a general feature of the shadow cone in the energy range of ISS are first discussed as a basis for the descriptions of particular examples of ISS studies which follow. The examples are concerned with the atomic structure analysis of clean surfaces, surfaces with adsorbates, and surface defects.
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