Quantitative force and mass measurements using the cantilever with integrated actuator and deflection detector

Abstract

Applications based on cantilever sensor technology like atomic force microscopy, mass spectroscopy, magnetic resonance force microscopy, and other physical or chemical sensing techniques demand theoretical understanding of sensing and actuation mechanism. Moreover reliable calibration of any instrumentation is necessary in order to enable comparison of obtained results between various laboratories. When mass or force investigations are performed in nanoscale the reliable system calibration is even more difficult due to the lack of appropriate references and established metrological techniques. In this article we present the calibration methodology of thermally driven piezoresistive cantilevers which were used for mass and force measurements. We adapt the mass loading spring constant calibration method and compare the results obtained in this way with the method which was based on the resonance frequency detection. Additionally we will present results of the cantilever deflection sensitivity measurement and low-frequency noise properties.