Abstract
Reflection electron energy loss spectroscopy and x-ray photoemission spectroscopy results obtained from laser-ablated amorphous CNx thin films have been analyzed in order to quantitatively deduce the change of the threefold/fourfold carbon coordination ratio induced by the nitrogenation. It has been found that nitrogenation induces an increase of the threefold-coordinated carbon atoms with respect to the fourfold-coordinated ones, evidencing the graphitization of the material. All the bond concentrations of the threefold and fourfold coordinations have been evaluated.
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