Abstract
The Auger electron yields of six elements, namely C, N, O, P, S and Cl have been calibrated by combining Auger Electron Spectroscopy with the quantitative technique of ellipsometry. The atoms have been deposited on clean silicon and germanium surfaces by room temperature adsorption of mono-molecular layers containing one or more of the relevant atoms per molecule. The results are in good agreement with theoretical predictions. The contribution to the Auger electron yield by the electrons which are back-scattered from the substrate, appears to be approximately 20% for a silicon substrate and 30% for a germanium substrate.
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