Quantitative Analysis Using Secondary Ion Mass Spectrometry.

Abstract

Quantitative analyses based on reference materials in secondary ion mass spectrometry (SIMS) are reviewed from a statistical viewpoint. The accuracy and precision of quantitative values are examined through three round-robin studies using uniformly doped GaAs specimens. The current SIMS accuracy (reproducibility) deviation of ±30% depends on the accuracy of reference materials. The accuracy deviation is reduced to ~10% when common reference materials are used. The precision (repeatability) deviation is estimated to be 3-5%. Relative ion intensity, which is the ratio of the analyte signal to the matrix signal, depends on instrument type (mainly on the impact angle of primary ions), and its variation among the same type of instruments is smaller than that among different types. Using calibration parameter data, semi-quantitative analysis with ±50% deviation is possible.