Abstract
The resonant elastic scattering 16O( α, α) 16O at near 3.045 MeV is a very powerful tool for determining the oxygen concentration in oxide films. The resonance yield can be transformed into the stoichiometric ratio of oxygen to Ba–Ti as a function of the probed depth. By means of the resonance yield, we can obtain the oxygen concentration in BaTiO 3 films. In this work the method was used to analyze the oxygen concentration of the BaTiO 3 films deposited by pulsed laser deposition (PLD) at different oxygen ambience. Our experimental results demonstrate that the oxygen concentration in the films deposited by PLD is homogeneous, and the effect of oxygen pressure in the process of deposition on the oxygen concentration in the films is very significant. It is shown in our experiment that 20 Pa is the lowest value of oxygen pressure for forming optimum BaTiO 3 films by the PLD method.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
