Abstract
We report measurements of the hydrogen concentrations and densities of amorphous silicon films prepared from glow discharge plasmas of silane. Quantitative results are obtained from the resonant nuclear reaction 15N+1H→12C+4He+γ by counting the emitted γ rays. Mass spectrographic analysis of the gases evolved upon heating are also used to estimate the relative hydrogen concentrations for different preparation conditions. Comparisons are given to previously reported infrared absorption results and to electron microprobe estimates.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
