Abstract

The time-of-flight version of low energy ion scattering LEIS (TOF), avoids uncertainties in quantitative analysis due to neutralization in scattering. However, some other factors to consider are: a) accuracy of the scattering cross-sections employed, b) enhancement of scattering yields from sub-surface layers by focusing effects, c) dependence of detector efficiency on scattered energy, and d) background subtraction in integration of single-scattering peaks. We have investigated these problems using 2.4–10 keV Ne + beams scattered from a Cu 3Au (100) ordered surface in conjunction with computer simulation of the energy spectra and have found c) to be the most important potential source of error. Correction factors are derived from measurements of scattering yield vs E 0.

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