Quantitative analysis of auger electron spectroscopy by curve synthesis method based on non-linear least-squares fitting

Abstract

A curve synthesis method is applied to the quantitative analysis of Auger electron Spectroscopy. A non-linear least-squares fitting technique is useful to correct automatically the deviations of the energy scale between reference and observed spectra, and deconvolve a complex Auger spectrum with overlapping peaks due to different elements. Pre-filtration of the data using digital filters such as top-hat and derivative functions is also investigated.