Abstract
Surface analysis using electron spectroscopies is now a well-established and continuously expanding area. With appropriate data treatment procedures, both Auger electron spectroscopy (AES, not to be confused with atomic expression spectroscopy) and X-ray photoelectron spectroscopy (XPS or ESCA) can routinely supply reliable qualitative and semiquantitative characterization of the near-surface region (top 1-100 /Angstrom/) of most solids. Complex sample matrix and instrumental parameters make quantitation of surface electron spectroscopies a real challenge. Kenneth W. Nebesny, Brian L. Mashloff, and Neal R. Armstrong of the University of Arizona describe approaches that make it possible to obtain reliable compositional information.
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