Quantification of SIMS depth profiles of ODS-superalloys by using cluster ion formation from reactive primary ions

Abstract

Cluster ion formation, with both oxygen and caesium as reactive elements, (MO− and MCs+ ions) has been studied using secondary ion mass spectrometry. A comparison of various primary ion beam conditions is given. The investigations were carried out on aluminium oxide films and required a special charge compensation method. An improvement in the quantification concentration by use of cluster ions can only be expected from MCs+ measurements; however the total ionization probabilities still depend on matrix composition.