Quantification of energy dissipation for laterally oscillating microstructures

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Fluid film damping in laterally oscillating microstructures is investigated in the entire Knudsen regime and a wide Stokes number range using analytical and numerical results from Park et al. [“Rarefaction effects on shear driven oscillatory gas flows: A direct simulation Monte Carlo study in the entire Knudsen regime,” Phys. Fluids 16, 317 (2004)] and Hadjiconstantinou [“Oscillatory shear driven gas flows in the transition and free-molecular-flow regimes,” Phys. Fluids 17, 100611 (2005)]. An energy dissipation parameter per oscillation cycle that allows a consistent interpretation of the quality factor utilized in the design of microelectromechanical system devices is presented.