Abstract
Micromirrors are used in numerous applications such as optical switching, projection displays, biomedical imaging and adaptive optics. In this paper, eigen frequency and Q-factor analysis of a piezoelectrically actuated micromirror is performed. The mirror structure consists of an Aluminium mirror plate and cantilever on each side of the plate for piezoelectric actuation. Q-factor analysis is done for micromirror with different piezoelectric materials and the highest value is obtained for Lead Zirconate Titanate or PZT. Eigen frequency Analysis was also conducted and identified the modes of the micromirror. The mirror works in piston mode and bending mode at 12.478 KHz and 20.034 KHz respectively. The modeling and analysis are done using COMSOL Multiphysics 4.3b.
Published Version
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