Abstract
A potential application for ferroelectric thin films is micro positioning and actuation. For using PZT films as micro-actuators it is desirable to have film thicknesses of comparable size to the underlying structure. The amount of actuation possible is determined by the electric field across the film. Using a bi-layer should therefore increase the amount of actuation. PZT films of thickness 0.5 /spl mu/m have been deposited as a bilayer. Micro-actuators have been fabricated using these structures, their electric properties measured and their electro-mechanical properties characterised and evaluated using optical beam deflection.
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