Abstract
Piezoelectric coatings of PbZr x KTi1-x ,O3 (PZT) were deposited on standard telecommunication fibers. The PZT coatings were produced by reactive dc magnetron sputtering of metal targets in pure oxygen atmosphere. The deposition was carried out at substrate temperatures between 500 and 600 °C. Film thicknesses are in the range of 1300 to 1500 nm. The device structure under investigation is of the Ti/Pt/PZT/Au type X-ray diffraction (XRD) scanning electron microscopy (SEM), and electrical measurements were used to characterize the films Results on crystalline phase formation, microstructure, and ferroelectric behavior of the axially symmetric coatings are presented
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
