Abstract
Pyroelectric infrared (IR) arrays with 2×8 elements were developed using the PbZr0.3Ti0.7O3 (PZT) thin films and multilayered PbZr0.3Ti0.7O3/PbTiO3 (PZT/PT) thin films. At 1 kHz, dielectric constant of 389 and 558, dielectric loss of 0.012 and 0.011 were obtained for the PZT/PT and PZT thin films. The pyroelectric coefficients for the PZT/PT film and the PZT film were 380 and 400 μC/m2K. The detectivity figures of merit for the PZT/PT and PZT thin films were 20.3×10−6 Pa−1/2, and 18.7×10−6Pa−1/2, and the voltage response figures of merit were 0.038 m2/C and 0.028 m2/C, respectively. At 60 Hz radiation modulation frequency, the specific detectivity with an element size of 240×360 μm2 was 2.6×108 Hz1/2cm/W and 1.8×108 Hzl/2cmAV respectively. These experimental results show that the sensing element made of multilayered thin films is a better choice in developing high performance IR detectors.
Published Version
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