Abstract
PYROELECTRIC PROPERTIES OF LEAD ZIRCONIUM TITANATE (PbZr 0.525 Ti 0.475 O 3 ) METAL-FERROELECTRIC-METAL CAPACITOR AND ITS APPLICATION FOR IR SENSOR . Thin films lead zirconium titanate (PbZr 0.525 Ti 0.475 O 3 ) prepared on Pt(200)/SiO2/Si(100) substrates using chemical solution deposition (CSD) method for 0.5 M solution have been investigated. The films were grown by spin coating at 2500, 3000, 3500 rpm for 30 seconds, and then annealing at 750 o C for 3 hours. X-ray diffraction (XRD), pyroelectric properties observation were employed to characterize the grown films. The film shows tetragonal structure with lattice constants are a = b = 4.141 A, c = 3.828 A. The voltage responsivity (r v ) measured at chopper frequency of 2000 Hz and at wavelength of 947 nm are between 32.7-44.9 μV/W. Meanwhile, the pyroelectric coefficient (p) are in the range of 5.01 x 10 -4 -6.88 x 10 -4 C/m 2 K for PZT thin films. These results show that PZT thin films are suitable for use as a pyroelectric IR sensor.
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