Pyramid microstructure with single walled carbon nanotubes for flexible and transparent micro-pressure sensor with ultra-high sensitivity

Abstract

Using a well-designed PDMS pyramid microstructure covered by non-uniform distributed single walled carbon nanotube (SWCNT) networks, a type of micro-pressure sensors with ultra-high sensitivity, transparency and flexibility were demonstrated. The low-conductivity-tip/high-conductivity-body electrical structure leads to an ultra-high sensitivity of 8655.6kPa−1. The ingenious design of the sensor on structure and material allows a very low unloading current (0.88nA), suggesting an extremely low power to drive the device. Moreover, the device has a fast response time (less than 4ms), low pressure detect limit (less than 7.3Pa) and long-term service life (over than 10000 cycles test). All these features make the sensor an ideal candidate for applications in Electronic-skin and health care.