Abstract
TiN coatings are deposited by reactive magnetron sputtering, cathodic arc evaporation and hollow cathode discharge arc evaporation on high speed steel samples representing different 3D profiles. The thickness, morphology and hardness distribution on the model samples are determined for a double magnetron, an unbalanced magnetron, a hollow cathode discharge and a cathodic arc evaporation laboratory arrangement, and an industrial two-source cathodic arc deposition system. The properties depend strongly on the deposition technique, the angle of incidence, the deposition conditions (with and without sample movement) and the profile depth of the groove and wedge samples.
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